吉時利<圓片級可靠性系統(tǒng)手冊>(英文版)

The latest ACS WLR systems leverage the parallel test power of
Keithley’s ACS software with the addition of a powerful
Reliability Test Module (RTM), which provides an intuitive,
interactive, no-coding-required environment for setting up
stress/measure sequences. The RTM supports traditional
JEDEC standard reliability tests and is flexible enough to
accelerate the development of the new test methodologies
necessary to characterize emerging technologies. RTM projects
for TDDB, JRAMP, VRAMP, HCI, Isothermal Electromigration, and
NBTI are included. An integrated formulator populated with
standard parametric extraction calculations allows easy pointand-
click analysis. A variety of modeling, line fitting, and
standard math functions allows custom data manipulation
without programming.