基于光學系統(tǒng)信息傳輸不變性原理, 討論了微型反射式共焦光纖傳感器的高分辨率性質。該傳感器的光纖末端頭起到了共焦掃描光學顯微鏡的點光源和點探測器的功能, 從而使視場減小, 信噪比提高, 抗干擾性增強。它獨特的高軸向分辨率特性, 可用于微觀形貌、外形尺寸和曲面輪廓等方面的高精度檢測, 同時為狹小空間內尺度測量等大量極限測量和不可測問題提供了解決思路。
關鍵詞: 共焦顯微成像; 光纖傳感器; 自聚焦透鏡; 光學信息
Abstract: Based on the concep t of the info rmat ion invariance of an op t ical system , the p roperty of the h igh reso lut ion of the reflect ive confocal op t ical senso r is discussed. The characterist ic of po int ligh t source and po int detecto r of confocal scanning op t icalm icro scopy caused by the end of th is senso rmakes the view field smaller, increases signal to no ise rat io, imp roves the ant i2interference ability. Because of the special characterist ic of h igh axis reso lut ion, the senso r can be used in the p recise measurement of surface p rofile, shape dimension and curve contour,w h ich p rovides a suggest ion fo r a great deal of di2 mensionalmeasurement in small space.
Key words: Confocalm icro scopy; F iber2op t ic senso r; Graded index (GR IN ) lens; Op t ical info rmat ion